Modelling and fabrication of GaAs photonic-crystal cavities for cavity quantum electrodynamics

  • U. K. Khankhoje
  • , S. H. Kim
  • , B. C. Richards
  • , J. Hendrickson
  • , J. Sweet
  • , J. D. Olitzky
  • , G. Khitrova
  • , H. M. Gibbs
  • , A. Scherer

Research output: Contribution to journalArticlepeer-review

Abstract

In this paper, we present recent progress in the growth, modelling, fabrication and characterization of gallium arsenide (GaAs) two-dimensional (2D) photonic-crystal slab cavities with embedded indium arsenide (InAs) quantum dots (QDs) that are designed for cavity quantum electrodynamics (cQED) experiments. Photonic-crystal modelling and device fabrication are discussed, followed by a detailed discussion of different failure modes that lead to photon loss. It is found that, along with errors introduced during fabrication, other significant factors such as the presence of a bottom substrate and cavity axis orientation with respect to the crystal axis, can influence the cavity quality factor (Q). A useful diagnostic tool in the form of contour finite-difference time domain (FDTD) is employed to analyse device performance.

Original languageEnglish (US)
Article number065202
JournalNanotechnology
Volume21
Issue number6
DOIs
StatePublished - 2010

ASJC Scopus subject areas

  • Bioengineering
  • General Chemistry
  • General Materials Science
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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