Modeling of a thin film pyroelectric pixel: Transient results

Pyroelectric thin films are receiving increasing attention for the next generation of integrated room temperature uncooled IR arrays. Pixel size and NETD (net equivalent temperature difference) of 50 μm and 0.005K are projected respectively. In this study, the 1-D transient response of a pixel consisting of black absorber, pyroelectric, Pt, TiO₂, SiO₂ and Si are performed. Thermal conduction and radiative transfer are assumed to take place across this stack and at the Si substrate-air interface, respectively. The effects of individual film thickness, IR chopping frequency, thermal conductivity of the thermal barrier layer and substrate thickness on the pyroelectric response are investigated.