@inbook{804775707f1a470d8cfccf828a498230,
title = "Modeling",
keywords = "Elastohydrodynamic lubrication, Mean pad leading edge temperature, Roughness-dominated and asperity filtering regimes",
author = "Leonard Borucki and Ara Philipossian",
year = "2007",
month = mar,
day = "23",
doi = "10.1002/9780470180907.ch6",
language = "English (US)",
isbn = "9780471719199",
pages = "171--200",
booktitle = "Microelectronic Applications of Chemical Mechanical Planarization",
publisher = "John Wiley & Sons, Inc.",
}