Miniature, fiber-coupled 3-DOF interferometer for precision micro-motion stage metrology

Steven Gillmer, Richard Smith, Shane C. Woody, Joshua Tarbutton, Jonathan D. Ellis

Research output: Contribution to conference › Paper › peer-review

Original language	English (US)
Pages	77-80
Number of pages	4
State	Published - 2012
Event	27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012 - San Diego, CA, United States Duration: Oct 21 2012 → Oct 26 2012

Conference	27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012
Country/Territory	United States
City	San Diego, CA
Period	10/21/12 → 10/26/12

ASJC Scopus subject areas

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title = "Miniature, fiber-coupled 3-DOF interferometer for precision micro-motion stage metrology",

author = "Steven Gillmer and Richard Smith and Woody, {Shane C.} and Joshua Tarbutton and Ellis, {Jonathan D.}",

year = "2012",

language = "English (US)",

pages = "77--80",

note = "27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012 ; Conference date: 21-10-2012 Through 26-10-2012",

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TY - CONF

T1 - Miniature, fiber-coupled 3-DOF interferometer for precision micro-motion stage metrology

AU - Gillmer, Steven

AU - Smith, Richard

AU - Woody, Shane C.

AU - Tarbutton, Joshua

AU - Ellis, Jonathan D.

PY - 2012

Y1 - 2012

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M3 - Paper

AN - SCOPUS:84884188189

SP - 77

EP - 80

T2 - 27th Annual Meeting of the American Society for Precision Engineering, ASPE 2012

Y2 - 21 October 2012 through 26 October 2012

ER -