Mid-infrared spatial filters fabrication using laser chemical etching

Christian Y. Drouët D'Aubigny, Christopher K. Walker, Dathon Golish

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations


Feedhorns like those commonly used in radio-telescope and radio communication equipment couple very efficiently (>98%) to the fundamental Gaussian mode (TEM00). High order modes are not propagated through a single-mode hollow metallic waveguides. It follows that a back to back feedhorn design joined with a small length of single-mode waveguide can be used as a very high throughput spatial filter. Laser micro machining provides a mean of scaling successful waveguide and quasi-optical components to far and mid infrared wavelengths. A laser micro machining system optimized for THz and far IR applications has been in operation at Steward Observatory for several years and produced devices designed to operate at λ=60μm. A new laser micromachining system capable of producing mid-infrared devices will soon be operational. These proceedings review metallic hollow waveguide spatial filtering theory, feedhorn designs as well as laser chemical etching and the design of a new high-NA UV laser etcher capable of sub-micron resolution to fabricate spatial filters for use in the mid-infrared.

Original languageEnglish (US)
Article number76
Pages (from-to)655-666
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
Issue numberPART 2
StatePublished - 2004
EventNew Frontiers in Stellar Interferometry - Glasgow, United Kingdom
Duration: Jun 21 2004Jun 25 2004


  • Chemical Etching
  • Hollow Waveguide
  • Interferometry
  • Laser Machining
  • Silicon
  • Single Mode

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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