Microtags with 150-nm line gratings fabricated by use of extreme-ultraviolet lithography

M. R. Descour, D. I. Simon, W. C. Sweatt, M. E. Warren, S. H. Kravitz, K. D. Krenz, A. K. Ray-Chaudhuri, R. H. Stulen

Research output: Contribution to journalArticlepeer-review


The microtag concept is an anticounterfeiting and security measure. Microtags are computer-generated holograms (CGH's) consisting of 150-nm lines arranged to form 300-nm-period gratings. The microtags that we describe were designed for readout at 442 nm. The smallest microtag measures 56 μm × 80 μm when viewed at normal incidence. The CGH design process uses a modified iterative Fourier-transform algorithm to create either phase-only or phase-and-amplitude microtags. We also report on a simple and compact readout system for recording the diffraction pattern formed by a microtag. The measured diffraction patterns agree very well with predictions.

Original languageEnglish (US)
Pages (from-to)13-15
Number of pages3
JournalOptics letters
Issue number1
StatePublished - Jan 1 1998
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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