Microscope system for Blu-ray disc samples

Jun Zhang; Seung Hune Yang; Youngsik Kim; Tom D. Milster; Jong Rak Park

doi:10.1364/AO.49.006878

Microscope system for Blu-ray disc samples

Jun Zhang, Seung Hune Yang, Youngsik Kim, Tom D. Milster, Jong Rak Park

Research output: Contribution to journal › Article › peer-review

Abstract

We introduce a microscope system using a solid immersion lens (SIL) to image Blu-ray disc samples without removing the protective cover layer. The aberration caused by the cover layer is minimized with a truncated SIL. A subsurface imaging simulation is achieved by using the rigorous coupled wave theory, partial coherence, vector diffraction, and the Babinet principle. Simulated results are compared with experimental images and atomic force microscopy measurements.

Original language	English (US)
Pages (from-to)	6878-6887
Number of pages	10
Journal	Applied optics
Volume	49
Issue number	36
DOIs	https://doi.org/10.1364/AO.49.006878
State	Published - Dec 20 2010

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Engineering (miscellaneous)
Electrical and Electronic Engineering

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10.1364/AO.49.006878

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abstract = "We introduce a microscope system using a solid immersion lens (SIL) to image Blu-ray disc samples without removing the protective cover layer. The aberration caused by the cover layer is minimized with a truncated SIL. A subsurface imaging simulation is achieved by using the rigorous coupled wave theory, partial coherence, vector diffraction, and the Babinet principle. Simulated results are compared with experimental images and atomic force microscopy measurements.",

author = "Jun Zhang and Yang, {Seung Hune} and Youngsik Kim and Milster, {Tom D.} and Park, {Jong Rak}",

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AU - Milster, Tom D.

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Microscope system for Blu-ray disc samples

Abstract

ASJC Scopus subject areas

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