@inproceedings{e54449882b86458f85c7020b64665841,
title = "Micromachining with femtosecond laser higher-order bessel beams",
author = "Weibo Cheng and Pavel Polynkin",
year = "2015",
language = "English (US)",
series = "Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015",
publisher = "Optical Society of America",
booktitle = "Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015",
note = "2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015 ; Conference date: 21-06-2015 Through 25-06-2015",
}