Abstract
Polycrystalline thin films based on two elemental semiconducting materials, Si and Ge, have been utilized to fabricate microthermistors. The thermistors are designed in a heavy-light-heavy doping concentration arrangement. The design, fabrication, analysis and characterization of a variety of thermistors under different doping schemes is described. Finally, the operation of the thermistors in self-heating operation is discussed. The results provide a systematic framework for the application of semiconducting microthermoresistors.
Original language | English (US) |
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Pages (from-to) | 653-664 |
Number of pages | 12 |
Journal | Measurement Science and Technology |
Volume | 10 |
Issue number | 8 |
DOIs | |
State | Published - Aug 1999 |
Externally published | Yes |
Keywords
- Integrated microsystems
- Polycrystalline semiconductors
- Temperature microsensors
- Thermoresistors
ASJC Scopus subject areas
- Instrumentation
- Engineering (miscellaneous)
- Applied Mathematics