Micromachined 50jim x 25opm silicon torsional mirror arrays for optical signal processing

Pinju Hsiang, Augusto Garcia-Valenzula, Mark A. Neifeld, M. Tabib-Azar

Research output: Contribution to journalConference articlepeer-review

4 Scopus citations


We propose an array of electrostatically driven torsional mirrors for optical signal processing. This 10-element device is 1-dimensional with pixels of 50im x 250im. The device is basically a hybrid integrated optical device which is fabricated in silicon and can be integrated with photodetectors and processing electronics to create elements of the so-called "smart pixel" class of spatial light modulators. This class of devices will find application in many areas of optical processing including optical interconnects, optical switching, optical image analysis and optical neural networks. We discuss the design and fabrication of mirror arrays and electrode strips that are used to actuate them. The resonant frequency and deflection angle v.5. applied voltage of the fabricated devices are measured and compared with theoretical predictions.

Original languageEnglish (US)
Pages (from-to)190-198
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - Mar 2 1993
Externally publishedYes
EventIntegrated Optics and Microstructures 1992 - Boston, United States
Duration: Sep 8 1992Sep 11 1992

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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