MicroLED chromatic confocal microscope

In this Letter, a microLED-based chromatic confocal microscope with a virtual confocal slit is proposed and demonstrated for three-dimensional (3D) profiling without any mechanical scanning or external light source. In the proposed method, a micro-scale light-emitting diode (microLED) panel works as a point source array to achieve lateral scanning. Axial scanning is realized through the chromatic aberration of an aspherical objective.Avirtual pinhole technique is utilized to improve the contrast and precision of depth reconstruction. The system performance has been demonstrated with a diamond-turned copper sample and onion epidermis. The experimental results show that the microLED panel could be a potential solution for portable 3D confocal microscopy. Several considerations and prospects are proposed for future microLED requirements in confocal imaging.