Microfabricated quadrupole ion trap for mass spectrometer applications

S. Pau; C. S. Pai; Y. L. Low; J. Moxom; P. T.A. Reilly; W. B. Whitten; J. M. Ramsey

doi:10.1103/physrevlett.96.120801

Microfabricated quadrupole ion trap for mass spectrometer applications

S. Pau, C. S. Pai, Y. L. Low, J. Moxom, P. T.A. Reilly, W. B. Whitten, J. M. Ramsey

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Abstract

An array of miniaturized cylindrical quadrupole ion traps, with a radius of 20 μm, is fabricated using silicon micromachining using phosphorus doped polysilicon and silicon dioxide for the purpose of creating a mass spectrometer on a chip. We have operated the array for mass-selective ion ejection and mass analysis using Xe ions at a pressure of 10-4Torr. The scaling rules for the ion trap in relation to operating pressure, voltage, and frequency are examined.

Original language	English (US)
Article number	120801
Journal	Physical review letters
Volume	96
Issue number	12
DOIs	https://doi.org/10.1103/physrevlett.96.120801
State	Published - 2006

ASJC Scopus subject areas

General Physics and Astronomy

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10.1103/physrevlett.96.120801

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abstract = "An array of miniaturized cylindrical quadrupole ion traps, with a radius of 20 μm, is fabricated using silicon micromachining using phosphorus doped polysilicon and silicon dioxide for the purpose of creating a mass spectrometer on a chip. We have operated the array for mass-selective ion ejection and mass analysis using Xe ions at a pressure of 10-4Torr. The scaling rules for the ion trap in relation to operating pressure, voltage, and frequency are examined.",

author = "S. Pau and Pai, {C. S.} and Low, {Y. L.} and J. Moxom and Reilly, {P. T.A.} and Whitten, {W. B.} and Ramsey, {J. M.}",

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doi = "10.1103/physrevlett.96.120801",

language = "English (US)",

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journal = "Physical review letters",

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AU - Pau, S.

AU - Pai, C. S.

AU - Low, Y. L.

AU - Moxom, J.

AU - Reilly, P. T.A.

AU - Whitten, W. B.

AU - Ramsey, J. M.

PY - 2006

Y1 - 2006

N2 - An array of miniaturized cylindrical quadrupole ion traps, with a radius of 20 μm, is fabricated using silicon micromachining using phosphorus doped polysilicon and silicon dioxide for the purpose of creating a mass spectrometer on a chip. We have operated the array for mass-selective ion ejection and mass analysis using Xe ions at a pressure of 10-4Torr. The scaling rules for the ion trap in relation to operating pressure, voltage, and frequency are examined.

AB - An array of miniaturized cylindrical quadrupole ion traps, with a radius of 20 μm, is fabricated using silicon micromachining using phosphorus doped polysilicon and silicon dioxide for the purpose of creating a mass spectrometer on a chip. We have operated the array for mass-selective ion ejection and mass analysis using Xe ions at a pressure of 10-4Torr. The scaling rules for the ion trap in relation to operating pressure, voltage, and frequency are examined.

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JO - Physical review letters

JF - Physical review letters

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Microfabricated quadrupole ion trap for mass spectrometer applications

Abstract

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