Abstract
A survey of current international research on MEMS is presented. The principal technology involved in MEMS and its industrial application are introduced. The research of MEMS conducted by leading international institutes was analyzed and some suggestions are proposed for future development of MEMS technology in China.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 37-42 |
| Number of pages | 6 |
| Journal | Tien Tzu Hsueh Pao/Acta Electronica Sinica |
| Volume | 23 |
| Issue number | 10 |
| State | Published - Oct 1995 |
| Externally published | Yes |
ASJC Scopus subject areas
- Electrical and Electronic Engineering