Microelectro-optical devices in a 5-level polysilicon surface micromachining technology

James H. Smith, M. Steven Rodgers, Jeffry J. Sniegowski, Samuel L. Miller, Dale Hetherington, Paul J. McWhorter, Mial E. Warren

Research output: Contribution to journalConference articlepeer-review

7 Scopus citations


We recently reported on the development of a 5-level polysilicon surface micromachine fabrication process consisting of four levels of mechanical poly plus an electrical interconnect layer and its application to complex mechanical systems. This paper describes the application of this technology to create micro-optical systems-on-a-chip. These are demonstration systems, which show that five levels of polysilicon provide greater performance, reliability, and significantly increased functionality. This new technology makes it possible to realize levels of system complexity that have so far only existed on paper, while simultaneously adding to the robustness of many of the individual subassemblies.

Original languageEnglish (US)
Pages (from-to)42-47
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 1998
Externally publishedYes
EventProceedings of the 1998 Conference on Micromachined Devices and Components IV - Santa Clara, CA, USA
Duration: Sep 21 1998Sep 22 1998

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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