MICRO-CHANNELS WITH SUSPENDED TEMPERATURE SENSORS FOR HEAT TRANSFER STUDY

Linan Jiang, Yuelin Wang, Man Wong, Yitshak Zohar

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A micro-system consisting of micro-channels with integrated temperature sensors was successfully designed and fabricated for the study of heat-transfer properties of fluid flow in micro-domains. Surface micro-machining technology was used to construct the micro-channels with dimensions of about 40μm × 1.4μm × 4000μm. Polysilicon thermistors, 4μm × 4μm × 0.4μm in size were suspended across the channels and directly exposed to the fluid for local temperature measurements. The micro-channels and the micro-sensors were calibrated prior to the heat-transfer studies. Experimental results of temperature distributions along a micro-channel are presented. The integrated micro-system performance was analyzed to provide a framework for the interpretation of the experimental data, and the various heat-transfer mechanisms are subsequently discussed.

Original languageEnglish (US)
Title of host publicationMicro-Electro-Mechanical Systems (MEMS)
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages567-573
Number of pages7
ISBN (Electronic)9780791816387
DOIs
StatePublished - 1999
EventASME 1999 International Mechanical Engineering Congress and Exposition, IMECE 1999 - Nashville, United States
Duration: Nov 14 1999Nov 19 1999

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume1999-W

Conference

ConferenceASME 1999 International Mechanical Engineering Congress and Exposition, IMECE 1999
Country/TerritoryUnited States
CityNashville
Period11/14/9911/19/99

ASJC Scopus subject areas

  • Mechanical Engineering

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