MICRO-CHANNELS WITH SUSPENDED TEMPERATURE SENSORS FOR HEAT TRANSFER STUDY

Linan Jiang; Yuelin Wang; Man Wong; Yitshak Zohar

doi:10.1115/IMECE1999-0322

MICRO-CHANNELS WITH SUSPENDED TEMPERATURE SENSORS FOR HEAT TRANSFER STUDY

Linan Jiang, Yuelin Wang, Man Wong, Yitshak Zohar

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A micro-system consisting of micro-channels with integrated temperature sensors was successfully designed and fabricated for the study of heat-transfer properties of fluid flow in micro-domains. Surface micro-machining technology was used to construct the micro-channels with dimensions of about 40μm × 1.4μm × 4000μm. Polysilicon thermistors, 4μm × 4μm × 0.4μm in size were suspended across the channels and directly exposed to the fluid for local temperature measurements. The micro-channels and the micro-sensors were calibrated prior to the heat-transfer studies. Experimental results of temperature distributions along a micro-channel are presented. The integrated micro-system performance was analyzed to provide a framework for the interpretation of the experimental data, and the various heat-transfer mechanisms are subsequently discussed.

Original language	English (US)
Title of host publication	Micro-Electro-Mechanical Systems (MEMS)
Publisher	American Society of Mechanical Engineers (ASME)
Pages	567-573
Number of pages	7
ISBN (Electronic)	9780791816387
DOIs	https://doi.org/10.1115/IMECE1999-0322
State	Published - 1999
Externally published	Yes
Event	ASME 1999 International Mechanical Engineering Congress and Exposition, IMECE 1999 - Nashville, United States Duration: Nov 14 1999 → Nov 19 1999

Publication series

Name	ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume	1999-W

Conference

Conference	ASME 1999 International Mechanical Engineering Congress and Exposition, IMECE 1999
Country/Territory	United States
City	Nashville
Period	11/14/99 → 11/19/99

ASJC Scopus subject areas

Mechanical Engineering

Access to Document

10.1115/IMECE1999-0322

Cite this

Jiang, L., Wang, Y., Wong, M., & Zohar, Y. (1999). MICRO-CHANNELS WITH SUSPENDED TEMPERATURE SENSORS FOR HEAT TRANSFER STUDY. In Micro-Electro-Mechanical Systems (MEMS) (pp. 567-573). (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); Vol. 1999-W). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/IMECE1999-0322

MICRO-CHANNELS WITH SUSPENDED TEMPERATURE SENSORS FOR HEAT TRANSFER STUDY. / Jiang, Linan; Wang, Yuelin; Wong, Man et al.
Micro-Electro-Mechanical Systems (MEMS). American Society of Mechanical Engineers (ASME), 1999. p. 567-573 (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); Vol. 1999-W).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Jiang, L, Wang, Y, Wong, M & Zohar, Y 1999, MICRO-CHANNELS WITH SUSPENDED TEMPERATURE SENSORS FOR HEAT TRANSFER STUDY. in Micro-Electro-Mechanical Systems (MEMS). ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE), vol. 1999-W, American Society of Mechanical Engineers (ASME), pp. 567-573, ASME 1999 International Mechanical Engineering Congress and Exposition, IMECE 1999, Nashville, United States, 11/14/99. https://doi.org/10.1115/IMECE1999-0322

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abstract = "A micro-system consisting of micro-channels with integrated temperature sensors was successfully designed and fabricated for the study of heat-transfer properties of fluid flow in micro-domains. Surface micro-machining technology was used to construct the micro-channels with dimensions of about 40μm × 1.4μm × 4000μm. Polysilicon thermistors, 4μm × 4μm × 0.4μm in size were suspended across the channels and directly exposed to the fluid for local temperature measurements. The micro-channels and the micro-sensors were calibrated prior to the heat-transfer studies. Experimental results of temperature distributions along a micro-channel are presented. The integrated micro-system performance was analyzed to provide a framework for the interpretation of the experimental data, and the various heat-transfer mechanisms are subsequently discussed.",

author = "Linan Jiang and Yuelin Wang and Man Wong and Yitshak Zohar",

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language = "English (US)",

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AB - A micro-system consisting of micro-channels with integrated temperature sensors was successfully designed and fabricated for the study of heat-transfer properties of fluid flow in micro-domains. Surface micro-machining technology was used to construct the micro-channels with dimensions of about 40μm × 1.4μm × 4000μm. Polysilicon thermistors, 4μm × 4μm × 0.4μm in size were suspended across the channels and directly exposed to the fluid for local temperature measurements. The micro-channels and the micro-sensors were calibrated prior to the heat-transfer studies. Experimental results of temperature distributions along a micro-channel are presented. The integrated micro-system performance was analyzed to provide a framework for the interpretation of the experimental data, and the various heat-transfer mechanisms are subsequently discussed.

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MICRO-CHANNELS WITH SUSPENDED TEMPERATURE SENSORS FOR HEAT TRANSFER STUDY

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