Abstract
This paper describes the development of a miniature assembly cell for microsystems. The cell utilizes a transparent electrostatic gripper allowing the use of computer vision for part alignment with respect to the gripper. Part to assembly alignment is achieved via optical triangulation using a fiber-coupled laser and a position sensitive detector (PSD). The system layout, principle of operation and design are described along with the visual and optical control algorithms and their implementation. Experimental measurements of the performance of the stage indicate normal and tangential gripping forces in the range of 0.03-2.5 mN and 1.-9. mN respectively. The visual search algorithm limits the feature tracking speed to 111ms /search. The alignment accuracy of the visual and optical proportional position feedback controls were determined to be ±7 μm and ±10 μm respectively.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 269-280 |
| Number of pages | 12 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 5267 |
| DOIs | |
| State | Published - 2003 |
| Event | Intelligent Robots and Computer Vision XXI: Algorithms, Techniques, and Active Vision - Providence, RI, United States Duration: Oct 28 2003 → Oct 29 2003 |
Keywords
- Disparate sensing modalities
- Electrostatic clamp
- Optical feedback
- Visual servoing
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering