Micro-assembly cell with dual optical/computer vision control for electrostatic gripping of MEMS

Eniko T. Enikov, Scott Clark, Lyubomir Minkov

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations


This paper describes the development of a miniature assembly cell for microsystems. The cell utilizes a transparent electrostatic gripper allowing the use of computer vision for part alignment with respect to the gripper. Part to assembly alignment is achieved via optical triangulation using a fiber-coupled laser and a position sensitive detector (PSD). The system layout, principle of operation and design are described along with the visual and optical control algorithms and their implementation. Experimental measurements of the performance of the stage indicate normal and tangential gripping forces in the range of 0.03-2.5 mN and 1.-9. mN respectively. The visual search algorithm limits the feature tracking speed to 111ms /search. The alignment accuracy of the visual and optical proportional position feedback controls were determined to be ±7 μm and ±10 μm respectively.

Original languageEnglish (US)
Pages (from-to)269-280
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2003
EventIntelligent Robots and Computer Vision XXI: Algorithms, Techniques, and Active Vision - Providence, RI, United States
Duration: Oct 28 2003Oct 29 2003


  • Disparate sensing modalities
  • Electrostatic clamp
  • Optical feedback
  • Visual servoing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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