@inbook{3b98ef8a7a834d468f986bc96a907a26,
title = "Micro- and Nano-assembly and Manipulation Techniques for MEMS",
abstract = "This paper presents a review of the most commonly used techniques for the assembly of micro-systems. Following a brief overview of the dominant forces working at this scale, the operation and design of mechanical, electrostatic, and magnetic micro-grippers is presented. The use of electrostatic forces is further described in the context of nano-assembly, where sub-micron-sized charged spots are used as the anchoring sites for nano-particles.",
keywords = "Dielectric Layer, Filling Ratio, Manipulation Technique, Shape Memory Alloy, Uterine Artery Embolization",
author = "Enikov, \{Eniko T.\}",
note = "Publisher Copyright: {\textcopyright} 2006, CISM, Udine.",
year = "2006",
doi = "10.1007/978-3-211-48549-1\_7",
language = "English (US)",
series = "CISM International Centre for Mechanical Sciences, Courses and Lectures",
publisher = "Springer International Publishing",
pages = "135--156",
booktitle = "CISM International Centre for Mechanical Sciences, Courses and Lectures",
}