@inbook{3b98ef8a7a834d468f986bc96a907a26,
title = "Micro- and Nano-assembly and Manipulation Techniques for MEMS",
abstract = "This paper presents a review of the most commonly used techniques for the assembly of micro-systems. Following a brief overview of the dominant forces working at this scale, the operation and design of mechanical, electrostatic, and magnetic micro-grippers is presented. The use of electrostatic forces is further described in the context of nano-assembly, where sub-micron-sized charged spots are used as the anchoring sites for nano-particles.",
keywords = "Dielectric Layer, Filling Ratio, Manipulation Technique, Shape Memory Alloy, Uterine Artery Embolization",
author = "Enikov, {Eniko T.}",
note = "Funding Information: This material is based upon the work supported by the National Science Foundation under Grants No. DMI-0134585 and DMI-0303868. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author (s) and do not necessarily reflect the views of the National Science Foundation. Publisher Copyright: {\textcopyright} 2006, CISM, Udine.",
year = "2006",
doi = "10.1007/978-3-211-48549-1_7",
language = "English (US)",
series = "CISM International Centre for Mechanical Sciences, Courses and Lectures",
publisher = "Springer International Publishing",
pages = "135--156",
booktitle = "CISM International Centre for Mechanical Sciences, Courses and Lectures",
}