@inproceedings{42e48fd8a76b4b63b95fb89d3b04b247,
title = "Metrology Advancements towards Diffraction-Limited X-ray Optics",
abstract = "Next-generation X-ray telescopes require mirrors with surface height errors of a few nanometers. Traditional Fizeau interferometry is limited due to the characterization of reference surfaces. Axial shift mapping (ASM) is a self-referencing interferometric method that can separate the reference surface from the surface under test. This paper discusses the necessary measurement uncertainty for the Lynx X-ray Observatory concept as well as potential diffraction-limited telescopes. Plans to verify the accuracy of ASM with at-wavelength measurements are discussed.",
keywords = "at-wavelength metrology, grazing-incidence mirrors, shear interferometry, X-ray optics",
author = "Whalen, \{Mallory M.\} and Heine, \{Sarah N.T.\} and Alan Garner and Chalifoux, \{Brandon D.\} and Marshall, \{Herman L.\} and Heilmann, \{Ralf K.\} and Schattenburg, \{Mark L.\}",
note = "Publisher Copyright: {\textcopyright} 2025 SPIE. All rights reserved.; 12th Optics for EUV, X-Ray, and Gamma-Ray Astronomy ; Conference date: 04-08-2025 Through 07-08-2025",
year = "2025",
month = sep,
day = "19",
doi = "10.1117/12.3063633",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Gaskin, \{Jessica A.\} and Daniele Spiga",
booktitle = "Optics for EUV, X-Ray, and Gamma-Ray Astronomy XII",
}