Method to evaluate surface figure error budget for optical systems

Weichuan Gao; Richard N. Youngworth; Jose SAsian

doi:10.1117/1.OE.57.10.105108

Method to evaluate surface figure error budget for optical systems

Weichuan Gao
, Richard N. Youngworth
, Jose SAsian

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

We present a simple method to assess surface figure error tolerances of optical systems. From a statistical analysis, an empirical equation is obtained for estimating the overall wavefront error contribution from surface figure error tolerance assigned on each surface. The same equation can be used to evaluate the inverse sensitivity for surface figure error specification given an error budget.

Original language	English (US)
Article number	105108
Journal	Optical Engineering
Volume	57
Issue number	10
DOIs	https://doi.org/10.1117/1.OE.57.10.105108
State	Published - Oct 1 2018
Externally published	Yes

Keywords

Inverse sensitivity
RSS rule
Surface figure error
Tolerance

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
General Engineering

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10.1117/1.OE.57.10.105108

Cite this

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title = "Method to evaluate surface figure error budget for optical systems",

abstract = "We present a simple method to assess surface figure error tolerances of optical systems. From a statistical analysis, an empirical equation is obtained for estimating the overall wavefront error contribution from surface figure error tolerance assigned on each surface. The same equation can be used to evaluate the inverse sensitivity for surface figure error specification given an error budget.",

keywords = "Inverse sensitivity, RSS rule, Surface figure error, Tolerance",

author = "Weichuan Gao and Youngworth, \{Richard N.\} and Jose SAsian",

note = "Publisher Copyright: {\textcopyright} 2018 Society of Photo-Optical Instrumentation Engineers (SPIE).",

year = "2018",

month = oct,

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doi = "10.1117/1.OE.57.10.105108",

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T1 - Method to evaluate surface figure error budget for optical systems

AU - Gao, Weichuan

AU - Youngworth, Richard N.

AU - SAsian, Jose

PY - 2018/10/1

Y1 - 2018/10/1

N2 - We present a simple method to assess surface figure error tolerances of optical systems. From a statistical analysis, an empirical equation is obtained for estimating the overall wavefront error contribution from surface figure error tolerance assigned on each surface. The same equation can be used to evaluate the inverse sensitivity for surface figure error specification given an error budget.

AB - We present a simple method to assess surface figure error tolerances of optical systems. From a statistical analysis, an empirical equation is obtained for estimating the overall wavefront error contribution from surface figure error tolerance assigned on each surface. The same equation can be used to evaluate the inverse sensitivity for surface figure error specification given an error budget.

KW - Inverse sensitivity

KW - RSS rule

KW - Surface figure error

KW - Tolerance

UR - https://www.scopus.com/pages/publications/85056124992

UR - https://www.scopus.com/pages/publications/85056124992#tab=citedBy

U2 - 10.1117/1.OE.57.10.105108

DO - 10.1117/1.OE.57.10.105108

M3 - Article

AN - SCOPUS:85056124992

SN - 0091-3286

VL - 57

JO - Optical Engineering

JF - Optical Engineering

IS - 10

M1 - 105108

ER -

Method to evaluate surface figure error budget for optical systems

Abstract

Keywords

ASJC Scopus subject areas

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