Method to evaluate surface figure error budget for optical systems

Weichuan Gao, Richard N. Youngworth, Jose M Sasian

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


We present a simple method to assess surface figure error tolerances of optical systems. From a statistical analysis, an empirical equation is obtained for estimating the overall wavefront error contribution from surface figure error tolerance assigned on each surface. The same equation can be used to evaluate the inverse sensitivity for surface figure error specification given an error budget.

Original languageEnglish (US)
Article number105108
JournalOptical Engineering
Issue number10
StatePublished - Oct 1 2018


  • Inverse sensitivity
  • RSS rule
  • Surface figure error
  • Tolerance

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • General Engineering


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