Method for accelerated diamond fracture characterization in chemical mechanical planarization

  • Ruochen Han
  • , Xiaomin Wei
  • , Yun Zhuang
  • , Yasa Adi Sampurno
  • , Ara Philipossian

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

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Material Science

Engineering

Earth and Planetary Sciences

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