@inproceedings{a036c266d8e44027ae71bdd65ae80a74,
title = "Metal-induced laterally crystallized polycrystalline silicon for micro-systems: Mechanical and etching characteristics",
abstract = "It is determined that for metal-induced laterally crystallized (MILC) polycrystalline silicon (poly-Si), the mechanical and etch properties compare favorably with and the sensing and electrical properties are better than those of conventional low-pressure chemical vapor deposited (LPCVD) poly-Si. The etching characteristics of MILC poly-Si in tetra-methyl ammonium hydroxide (TMAH) solution have been studied. A unified model based on preferential grain boundary (GB) etching has been proposed to explain the etching behavior of poly-Si in TMAH.",
author = "Mingxiang Wang and Yeung, {Wan Lap} and Yitshak Zohar and Man Wong",
year = "2001",
language = "English (US)",
isbn = "0791835553",
series = "American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)",
pages = "345--349",
editor = "A.L. Lee and J. Simon and K. Breuer and S. Chen and R.S. Keynton and A. Malshe and J.-I. Mou and M. Dunn",
booktitle = "Micro-Electro-Mechanical Systems (MEMS) - 2001",
note = "2001 ASME International Mechanical Engineering Congress and Exposition ; Conference date: 11-11-2001 Through 16-11-2001",
}