MEMS based single cell penetration force sensor

Eniko T. Enikov, Bradley J. Nelson

Research output: Contribution to journalConference articlepeer-review

4 Scopus citations


The rapid development of reproductive biology has created a need for quantifying penetration forces during artificial fertilization. It has been demonstrated that the success of such procedures heavily depends on the mechanics of penetration of the egg's zona and membrane. To quantify the forces during intracytoplasmic injections we have developed a MEMS based force sensor. Deep RIE and fusion bonding are used to fabricate a variable capacitance type sensor. It is designed to measure the penetration force during intracytoplasmic injection of egg cells as well as other applications in the 1-500 μmN force range. The sensor measures tri-axial forces using a system of flexible beams subjected to bending and torsion. The process is relatively simple and allows for easy modification of the force range. A penetration pipette tip is attached to the sensor body using a low temperature bonding technique. Calibration, sensitivity and initial experimental data is provided.

Original languageEnglish (US)
Pages (from-to)40-46
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 1999
EventProceedings of the 1999 Microbotics and Microassembly - Boston, MA, USA
Duration: Sep 21 1999Sep 22 1999

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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