@inproceedings{f8358af5e02e4a43b5d04e1a84c5e359,
title = "MEMS actuator array as a neuro-physiological testing tool",
abstract = "Tactile perception of complex symbols through tactile stimulation is an exciting application of a phenomenon known as tactile illusion (TI). Sensation of motion on the skin can be produced by a limited number of discrete mechanical actuators applying light pressure over the skin. This phenomenon can thus be used as a neurophysiological testing tool to determine central and peripheral nervous system injury as well as providing an additional human-machine communication channel. This paper describes the development of a 4×5 actuator array of individual vibrating pixels for fingertip tactile communication. The array is approximately one square centimeter and utilizes novel micro-clutch MEMS technology. The individual pixels are turned ON and OFF by pairs of microscopic thermal actuators, while the main vibration is generated by a vibrating piezo-electric plate. The physiological parameters required for inducing tactile illusion are described. The fabrication sequence for the thermal microactuators along with actuation results are also presented.",
keywords = "SU8, Thermal actuators, piezo-actuators, tactile array, tactile illusion",
author = "Enikov, {Eniko T} and Lazarov, {K. V.} and Gonzales, {G. R.}",
note = "Publisher Copyright: {\textcopyright} 2002 IEEE.; 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology ; Conference date: 02-05-2002 Through 04-05-2002",
year = "2002",
doi = "10.1109/MMB.2002.1002342",
language = "English (US)",
series = "2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "337--340",
editor = "David Beebe and Andre Dittmar",
booktitle = "2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings",
}