Abstract
Optomechanical accelerometers promise quantum-limited readout, high bandwidth, self-calibration, and radiation-pressure stabilization. We present a simple, scalable platform that enables these benefits with sub-µg sensitivity and 10 kHz bandwidth, based on a pair of vertically integrated SiN membranes.
Original language | English (US) |
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Article number | JTu2I.3 |
Journal | Optics InfoBase Conference Papers |
State | Published - 2021 |
Event | CLEO: QELS_Fundamental Science, CLEO: QELS 2021 - Part of Conference on Lasers and Electro-Optics, CLEO 2021 - Virtual, Online, United States Duration: May 9 2021 → May 14 2021 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials