Megasonic cleaning of blanket and patterned samples in carbonated ammonia solutions for enhanced particle removal and reduced feature damage

Zhenxing Han, Manish Keswani, Srini Raghavan

Research output: Contribution to journalArticlepeer-review

16 Scopus citations

Abstract

An investigation of particle removal efficiency and feature damage has been conducted in NH4 OH/NH4 HCO3 cleaning solutions irradiated with megasonic energy. By adjusting the pH of the solution in the range of 8.2-8.5, high particle removal efficiency (PRE) was achieved while feature damage was reduced significantly. The sonoluminescence data collected from NH4 OH and NH4 OH/NH4 HCO 3 solutions indicate significant suppression of transient cavitation in alkaline solutions containing aqueous CO2.

Original languageEnglish (US)
Article number6549164
Pages (from-to)400-405
Number of pages6
JournalIEEE Transactions on Semiconductor Manufacturing
Volume26
Issue number3
DOIs
StatePublished - 2013
Externally publishedYes

Keywords

  • CO (aq.)
  • Megasonic cleaning
  • feature damage
  • particle removal efficiency (PRE)
  • sonoluminescence (SL)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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