Abstract
An investigation of particle removal efficiency and feature damage has been conducted in NH4 OH/NH4 HCO3 cleaning solutions irradiated with megasonic energy. By adjusting the pH of the solution in the range of 8.2-8.5, high particle removal efficiency (PRE) was achieved while feature damage was reduced significantly. The sonoluminescence data collected from NH4 OH and NH4 OH/NH4 HCO 3 solutions indicate significant suppression of transient cavitation in alkaline solutions containing aqueous CO2.
Original language | English (US) |
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Article number | 6549164 |
Pages (from-to) | 400-405 |
Number of pages | 6 |
Journal | IEEE Transactions on Semiconductor Manufacturing |
Volume | 26 |
Issue number | 3 |
DOIs | |
State | Published - 2013 |
Externally published | Yes |
Keywords
- CO (aq.)
- Megasonic cleaning
- feature damage
- particle removal efficiency (PRE)
- sonoluminescence (SL)
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Industrial and Manufacturing Engineering
- Electrical and Electronic Engineering