Mechanism and kinetics of nonequilibrium and multilayer adsorption and desorption of gases on solids

Harpreet S. Juneja; Asad Iqbal; Junpin Yao; Farhang Shadman

doi:10.1021/ie060475k

Mechanism and kinetics of nonequilibrium and multilayer adsorption and desorption of gases on solids

Harpreet S. Juneja, Asad Iqbal, Junpin Yao, Farhang Shadman

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

A novel approach to the characterization of dynamic interactions of gases with solid surfaces is developed. A model is developed to represent the simultaneous adsorption and desorption processes in these systems. The model can simulate properties of nonequilibrium adsorption and desorption processes as well as the equilibrium state (isotherms and isobars). It also provides information on the distribution of loading of tightly bound molecules as the first layer on the surface as well as loosely bound physisorbed molecules as the upper layers during a transient process and at the equilibrium state. The model is validated and applied to the adsorption of moisture on oxides (ZrO ₂ and HfO ₂). Practical application of this work is shown by optimizing the purge recipes for removal of moisture from ZrO ₂ film. Optimization helps in lowering gas and energy consumption as well as reducing the purge times.

Original language	English (US)
Pages (from-to)	6585-6593
Number of pages	9
Journal	Industrial and Engineering Chemistry Research
Volume	45
Issue number	19
DOIs	https://doi.org/10.1021/ie060475k
State	Published - Sep 13 2006
Externally published	Yes

ASJC Scopus subject areas

General Chemistry
General Chemical Engineering
Industrial and Manufacturing Engineering

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title = "Mechanism and kinetics of nonequilibrium and multilayer adsorption and desorption of gases on solids",

abstract = "A novel approach to the characterization of dynamic interactions of gases with solid surfaces is developed. A model is developed to represent the simultaneous adsorption and desorption processes in these systems. The model can simulate properties of nonequilibrium adsorption and desorption processes as well as the equilibrium state (isotherms and isobars). It also provides information on the distribution of loading of tightly bound molecules as the first layer on the surface as well as loosely bound physisorbed molecules as the upper layers during a transient process and at the equilibrium state. The model is validated and applied to the adsorption of moisture on oxides (ZrO 2 and HfO 2). Practical application of this work is shown by optimizing the purge recipes for removal of moisture from ZrO 2 film. Optimization helps in lowering gas and energy consumption as well as reducing the purge times.",

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T1 - Mechanism and kinetics of nonequilibrium and multilayer adsorption and desorption of gases on solids

AU - Juneja, Harpreet S.

AU - Iqbal, Asad

AU - Yao, Junpin

AU - Shadman, Farhang

PY - 2006/9/13

Y1 - 2006/9/13

N2 - A novel approach to the characterization of dynamic interactions of gases with solid surfaces is developed. A model is developed to represent the simultaneous adsorption and desorption processes in these systems. The model can simulate properties of nonequilibrium adsorption and desorption processes as well as the equilibrium state (isotherms and isobars). It also provides information on the distribution of loading of tightly bound molecules as the first layer on the surface as well as loosely bound physisorbed molecules as the upper layers during a transient process and at the equilibrium state. The model is validated and applied to the adsorption of moisture on oxides (ZrO 2 and HfO 2). Practical application of this work is shown by optimizing the purge recipes for removal of moisture from ZrO 2 film. Optimization helps in lowering gas and energy consumption as well as reducing the purge times.

AB - A novel approach to the characterization of dynamic interactions of gases with solid surfaces is developed. A model is developed to represent the simultaneous adsorption and desorption processes in these systems. The model can simulate properties of nonequilibrium adsorption and desorption processes as well as the equilibrium state (isotherms and isobars). It also provides information on the distribution of loading of tightly bound molecules as the first layer on the surface as well as loosely bound physisorbed molecules as the upper layers during a transient process and at the equilibrium state. The model is validated and applied to the adsorption of moisture on oxides (ZrO 2 and HfO 2). Practical application of this work is shown by optimizing the purge recipes for removal of moisture from ZrO 2 film. Optimization helps in lowering gas and energy consumption as well as reducing the purge times.

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Mechanism and kinetics of nonequilibrium and multilayer adsorption and desorption of gases on solids

Abstract

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