TY - JOUR
T1 - Mechanical characterization of sintered piezo-electric ceramic material using scanning acoustic microscope
AU - Habib, A.
AU - Shelke, A.
AU - Vogel, M.
AU - Pietsch, U.
AU - Jiang, Xin
AU - Kundu, T.
N1 - Funding Information:
Authors would like to thank Mr. Michael Vogel (University of Siegen) for SEM (Scanning Electron Microscopy) images. Financial support from the Alexander von Humboldt Foundation of Germany to T. Kundu and A. Shelke for their research stay in Germany is also gratefully acknowledged. A. Habib wishes to acknowledge the financial support provided by the Siegen Graduate School.
PY - 2012/12
Y1 - 2012/12
N2 - Lead Zirconate Titanate (PZT) is a piezo-electric ceramic material that needs to be characterized for its potential use in microelectronics. Energy dispersive X-ray analysis (EDX) is conducted to determine the chemical composition of the PZT ceramics. The scanning electron microscope (SEM) is performed to study the surface morphology, grain structure and grain boundaries. The SEM image helps us to understand the surface wave propagation and scattering phenomena by the PZT and the reason for its anisotropy and inhomogeneity due to the grain structure. In this paper scanning acoustic microscopy at 100 MHz excitation frequency is conducted for determining mechanical properties of PZT. Earlier works reported only the longitudinal wave speed in PZT while in this paper longitudinal, shear and surface acoustic wave speeds of sintered PZT are measured from its acoustic material signature (AMS) curves, also known as V(z) curves. AMS or V(z) curve is the variation of the output voltage as a function of the distance between the acoustic lens focal point and the reflecting surface. The average velocities of longitudinal, shear and surface acoustic waves in a PZT specimen are determined from its V(z) curve generated at 100 MHz excitation frequency and found to be over 5000 m/s, over 3000 m/s and between 2500 and 3000 m/s, respectively. From these velocities all elastic constants of the specimen are obtained.
AB - Lead Zirconate Titanate (PZT) is a piezo-electric ceramic material that needs to be characterized for its potential use in microelectronics. Energy dispersive X-ray analysis (EDX) is conducted to determine the chemical composition of the PZT ceramics. The scanning electron microscope (SEM) is performed to study the surface morphology, grain structure and grain boundaries. The SEM image helps us to understand the surface wave propagation and scattering phenomena by the PZT and the reason for its anisotropy and inhomogeneity due to the grain structure. In this paper scanning acoustic microscopy at 100 MHz excitation frequency is conducted for determining mechanical properties of PZT. Earlier works reported only the longitudinal wave speed in PZT while in this paper longitudinal, shear and surface acoustic wave speeds of sintered PZT are measured from its acoustic material signature (AMS) curves, also known as V(z) curves. AMS or V(z) curve is the variation of the output voltage as a function of the distance between the acoustic lens focal point and the reflecting surface. The average velocities of longitudinal, shear and surface acoustic waves in a PZT specimen are determined from its V(z) curve generated at 100 MHz excitation frequency and found to be over 5000 m/s, over 3000 m/s and between 2500 and 3000 m/s, respectively. From these velocities all elastic constants of the specimen are obtained.
KW - Acoustic material signature curves (AMS)
KW - Leaky surface acoustic waves (LSAWs)
KW - Piezo-electric ceramic
KW - Scanning acoustic microscopy (SAM)
KW - Scanning electron microscopy (SEM)
UR - http://www.scopus.com/inward/record.url?scp=84867661825&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84867661825&partnerID=8YFLogxK
U2 - 10.1016/j.ultras.2012.07.011
DO - 10.1016/j.ultras.2012.07.011
M3 - Article
C2 - 22989949
AN - SCOPUS:84867661825
SN - 0041-624X
VL - 52
SP - 989
EP - 995
JO - Ultrasonics
JF - Ultrasonics
IS - 8
ER -