Abstract
Advances in optical testing are as important as advances in fabrication because one can make only what one can measure. A high-precision metrology capability is utilized to close the gap between interferometric testing and lower precision metrology, laser radar, or contact-probe-based coordinate measuring machines (CMM) to accurately measure surfaces with large form error. This nearly universal optical testing method employs a precision CMM equipped with a non-contact, confocal probe. This technique was developed to characterize and align a broad spectrum of optical surfaces including ones with high slopes that are nearly impossible to measure using traditional interferometric testing without custom-made optics. Optical components covering a wide range of prescriptions, such as large convex conics, high-sloped aspherics, grazing-incidence x-ray optics, and highly deformed flats, were successfully measured. The resulting data were processed using custom-developed routines to determine the optic's alignment, the departure from design surface, and the as-built prescription parameters. This information was used to verify and guide the development and fabrication of novel optics.
Original language | English (US) |
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Article number | 084103 |
Journal | Optical Engineering |
Volume | 60 |
Issue number | 8 |
DOIs | |
State | Published - Aug 1 2021 |
Keywords
- adaptive optics
- confocal probe
- coordinate measuring machine
- large convex mirror
- optical coordinate metrology
- optical shop testing
- surface deformation
- universal optical testing
- x-ray optics
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- General Engineering