Measuring complex index and surface profile through phase-shifting interferometric techniques and maximum-likelihood estimation theory

Eric W. Rogala; Harrison H. Barrett

Measuring complex index and surface profile through phase-shifting interferometric techniques and maximum-likelihood estimation theory

Eric W. Rogala, Harrison H. Barrett

Medical Imaging

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A novel interferometer based upon a conventional phase-shifting design is presented. The aim is to introduce the capability of measuring both the surface profile and the complex index of refraction of the test surface. Maximum-likelihood estimation theory and Cramer-Rao lower bounds are introduced and shown to be an effective means of extracting the complex index and surface profile parameters from the measured data and quantitatively assessing the performance. As the design parameters are optimized, the results are shown to improve and approach the theoretical performance limit.

Original language	English (US)
Title of host publication	17th Congress of the International Commission for Optics
Subtitle of host publication	Optics for Science and New Technology
Pages	177-178
Number of pages	2
Edition	PART 1
State	Published - 1996
Event	17th Congress of the International Commission for Optics: Optics for Science and New Technology, ICO 1996 - Taejon, Korea, Republic of Duration: Aug 19 1996 → Aug 23 1996

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Number	PART 1
Volume	2778
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Other

Other	17th Congress of the International Commission for Optics: Optics for Science and New Technology, ICO 1996
Country/Territory	Korea, Republic of
City	Taejon
Period	8/19/96 → 8/23/96

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Cite this

Rogala, E. W., & Barrett, H. H. (1996). Measuring complex index and surface profile through phase-shifting interferometric techniques and maximum-likelihood estimation theory. In 17th Congress of the International Commission for Optics: Optics for Science and New Technology (PART 1 ed., pp. 177-178). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2778, No. PART 1).

Measuring complex index and surface profile through phase-shifting interferometric techniques and maximum-likelihood estimation theory. / Rogala, Eric W.; Barrett, Harrison H.
17th Congress of the International Commission for Optics: Optics for Science and New Technology. PART 1. ed. 1996. p. 177-178 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2778, No. PART 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Rogala, EW & Barrett, HH 1996, Measuring complex index and surface profile through phase-shifting interferometric techniques and maximum-likelihood estimation theory. in 17th Congress of the International Commission for Optics: Optics for Science and New Technology. PART 1 edn, Proceedings of SPIE - The International Society for Optical Engineering, no. PART 1, vol. 2778, pp. 177-178, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, ICO 1996, Taejon, Korea, Republic of, 8/19/96.

Rogala EW, Barrett HH. Measuring complex index and surface profile through phase-shifting interferometric techniques and maximum-likelihood estimation theory. In 17th Congress of the International Commission for Optics: Optics for Science and New Technology. PART 1 ed. 1996. p. 177-178. (Proceedings of SPIE - The International Society for Optical Engineering; PART 1).

Rogala, Eric W. ; Barrett, Harrison H. / Measuring complex index and surface profile through phase-shifting interferometric techniques and maximum-likelihood estimation theory. 17th Congress of the International Commission for Optics: Optics for Science and New Technology. PART 1. ed. 1996. pp. 177-178 (Proceedings of SPIE - The International Society for Optical Engineering; PART 1).

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Measuring complex index and surface profile through phase-shifting interferometric techniques and maximum-likelihood estimation theory

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