TY - GEN
T1 - Measuring complex index and surface profile through phase-shifting interferometric techniques and maximum-likelihood estimation theory
AU - Rogala, Eric W.
AU - Barrett, Harrison H.
PY - 1996
Y1 - 1996
N2 - A novel interferometer based upon a conventional phase-shifting design is presented. The aim is to introduce the capability of measuring both the surface profile and the complex index of refraction of the test surface. Maximum-likelihood estimation theory and Cramer-Rao lower bounds are introduced and shown to be an effective means of extracting the complex index and surface profile parameters from the measured data and quantitatively assessing the performance. As the design parameters are optimized, the results are shown to improve and approach the theoretical performance limit.
AB - A novel interferometer based upon a conventional phase-shifting design is presented. The aim is to introduce the capability of measuring both the surface profile and the complex index of refraction of the test surface. Maximum-likelihood estimation theory and Cramer-Rao lower bounds are introduced and shown to be an effective means of extracting the complex index and surface profile parameters from the measured data and quantitatively assessing the performance. As the design parameters are optimized, the results are shown to improve and approach the theoretical performance limit.
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M3 - Conference contribution
AN - SCOPUS:84887334796
SN - 0819421642
SN - 9780819421647
T3 - Proceedings of SPIE - The International Society for Optical Engineering
SP - 177
EP - 178
BT - 17th Congress of the International Commission for Optics
T2 - 17th Congress of the International Commission for Optics: Optics for Science and New Technology, ICO 1996
Y2 - 19 August 1996 through 23 August 1996
ER -