Original language | English (US) |
---|---|
Pages (from-to) | 41-50 |
Number of pages | 10 |
Journal | MICRO |
Volume | 15 |
Issue number | 5 |
State | Published - May 1997 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- General Materials Science
- Condensed Matter Physics
- Electronic, Optical and Magnetic Materials