Measuring and removing dissolved and colloidal silica in ultrapure water

Johanes Wibowo, Farhang Shadman, David Blackford

Research output: Contribution to journalArticlepeer-review

1 Scopus citations
Original languageEnglish (US)
Pages (from-to)41-50
Number of pages10
JournalMICRO
Volume15
Issue number5
StatePublished - May 1997

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • General Materials Science
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

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