Measurements and modeling of two-phase flow in microchannels with nearly constant heat flux boundary conditions

Lian Zhang, Jae Mo Koo, Linan Jiang, Mehdi Asheghi, Kenneth E. Goodson, Juan G. Santiago, Thomas W. Kenny

Research output: Contribution to journalArticlepeer-review

258 Scopus citations

Abstract

Two-phase forced convective flow in microchannels is promising for the cooling of integrated circuits. There has been limited research on boiling flow in channels with dimensions below 100 μm, in which bubble formation and flow regimes can differ from those in larger channels. This work develops single and multichannel experimental structures using plasma-etched silicon with pyrex glass cover, which allow uniform heating and spatially-resolved thermometry and provide optical access for visualization of boiling regimes. Boiling was observed with less than 5°C of super-heating in rectangular channels with hydraulic diameters between 25 and 60 μm. The channel wall widths are below 350 μm, which minimizes solid conduction and reduces variations in the heat flux boundary condition. Pressure drop and wall temperature distribution data are consistent with predictions accounting for solid conduction and homogeneous two-phase convection.

Original languageEnglish (US)
Pages (from-to)12-19
Number of pages8
JournalJournal of Microelectromechanical Systems
Volume11
Issue number1
DOIs
StatePublished - Feb 2002
Externally publishedYes

Keywords

  • Heat exchanger
  • Microchannel
  • Two-phase cooling

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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