Measurements and modeling of two-phase flow in microchannels with nearly-constant heat flux boundary conditions

Lian Zhang, Jae Mo Koo, Linan Jiang, Shilajeet S. Banerjee, Mehdi Ashegi, Kenneth E. Goodson, Juan G. Santiago, Thomas W. Kenny

Research output: Chapter in Book/Report/Conference proceedingConference contribution

26 Scopus citations

Abstract

Two-phase forced convective flow in microchannels can be used as an effective means of cooling microelectronics. However, the number of studies on boiling in microchannels with dimensions smaller than 100 microns is limited. Particularly, the impact of small dimensions on bubble formation and the critical heat flux have received little attention. This work develops single and multi-channel silicon test devices with integrated heaters and thermometers, in an effort toward precisely determining the flow condition, the temperature distribution, and the heat transfer coefficients within microchannels. Rectangular channels with hydraulic diameter below 100 microns and varying aspect ratios were fabricated. The test devices have channel walls with widths below 350 microns, which minimizes solid conduction along the test section and reduces variations in the heat flux boundary condition. A semiconductor resistor strip measures the wall temperature distribution along the channel during phase change. A thermal resistance model has been developed to estimate the heat loss from the system. Down to hydraulic diameters as small as 25 microns, nucleation boiling under 5 °C of wall superheating was observed in plasma etched silicon microchannels.

Original languageEnglish (US)
Title of host publicationMicro-Electro-Mechanical Systems (MEMS)
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages129-135
Number of pages7
ISBN (Electronic)9780791819005
DOIs
StatePublished - 2000
Externally publishedYes
EventASME 2000 International Mechanical Engineering Congress and Exposition, IMECE 2000 - Orlando, United States
Duration: Nov 5 2000Nov 10 2000

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume2000-AB

Conference

ConferenceASME 2000 International Mechanical Engineering Congress and Exposition, IMECE 2000
Country/TerritoryUnited States
CityOrlando
Period11/5/0011/10/00

ASJC Scopus subject areas

  • Mechanical Engineering

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