Measurement of small rotation angles by using a parallel interference pattern

Xiaoli Dai; Osami Sasaki; John E. Greivenkamp; Takamasa Suzuki

doi:10.1364/AO.34.006380

Measurement of small rotation angles by using a parallel interference pattern

Xiaoli Dai, Osami Sasaki, John E. Greivenkamp, Takamasa Suzuki

Research output: Contribution to journal › Article › peer-review

25 Scopus citations

Abstract

We propose a method for measuring rotation angles by using a parallel interference pattern. At two points on a parallel interference pattern reflected by an object, we detect phase changes in the reflected parallel interference pattern caused by rotations of the object. A high sensitivity, or a high ratio of the phase change to the rotation angle, 17 mrad/arcsec, can be achieved by determining the positions of two detection points. A high spatial resolution of 0.5 mm is also obtained. We analyze the measurement error caused by the alignment of the parallel interference pattern and a random measurement error caused by the phase detection. The theoretical analyses and the experimental results make the characteristics of the method clear and show that the method has an accuracy of 0.2 arcsec for small rotation angles.

Original language	English (US)
Pages (from-to)	6380-6388
Number of pages	9
Journal	Applied optics
Volume	34
Issue number	28
DOIs	https://doi.org/10.1364/AO.34.006380
State	Published - Oct 1995

Keywords

Angle measurement
Interferometry
Parallel interference pattern

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Engineering (miscellaneous)
Electrical and Electronic Engineering

Access to Document

10.1364/AO.34.006380

Cite this

@article{cb184283cfe045678d7f487e91f871a0,

title = "Measurement of small rotation angles by using a parallel interference pattern",

abstract = "We propose a method for measuring rotation angles by using a parallel interference pattern. At two points on a parallel interference pattern reflected by an object, we detect phase changes in the reflected parallel interference pattern caused by rotations of the object. A high sensitivity, or a high ratio of the phase change to the rotation angle, 17 mrad/arcsec, can be achieved by determining the positions of two detection points. A high spatial resolution of 0.5 mm is also obtained. We analyze the measurement error caused by the alignment of the parallel interference pattern and a random measurement error caused by the phase detection. The theoretical analyses and the experimental results make the characteristics of the method clear and show that the method has an accuracy of 0.2 arcsec for small rotation angles.",

keywords = "Angle measurement, Interferometry, Parallel interference pattern",

author = "Xiaoli Dai and Osami Sasaki and Greivenkamp, {John E.} and Takamasa Suzuki",

year = "1995",

month = oct,

doi = "10.1364/AO.34.006380",

language = "English (US)",

volume = "34",

pages = "6380--6388",

journal = "Applied optics",

issn = "1559-128X",

publisher = "Optica Publishing Group",

number = "28",

}

TY - JOUR

T1 - Measurement of small rotation angles by using a parallel interference pattern

AU - Dai, Xiaoli

AU - Sasaki, Osami

AU - Greivenkamp, John E.

AU - Suzuki, Takamasa

PY - 1995/10

Y1 - 1995/10

N2 - We propose a method for measuring rotation angles by using a parallel interference pattern. At two points on a parallel interference pattern reflected by an object, we detect phase changes in the reflected parallel interference pattern caused by rotations of the object. A high sensitivity, or a high ratio of the phase change to the rotation angle, 17 mrad/arcsec, can be achieved by determining the positions of two detection points. A high spatial resolution of 0.5 mm is also obtained. We analyze the measurement error caused by the alignment of the parallel interference pattern and a random measurement error caused by the phase detection. The theoretical analyses and the experimental results make the characteristics of the method clear and show that the method has an accuracy of 0.2 arcsec for small rotation angles.

AB - We propose a method for measuring rotation angles by using a parallel interference pattern. At two points on a parallel interference pattern reflected by an object, we detect phase changes in the reflected parallel interference pattern caused by rotations of the object. A high sensitivity, or a high ratio of the phase change to the rotation angle, 17 mrad/arcsec, can be achieved by determining the positions of two detection points. A high spatial resolution of 0.5 mm is also obtained. We analyze the measurement error caused by the alignment of the parallel interference pattern and a random measurement error caused by the phase detection. The theoretical analyses and the experimental results make the characteristics of the method clear and show that the method has an accuracy of 0.2 arcsec for small rotation angles.

KW - Angle measurement

KW - Interferometry

KW - Parallel interference pattern

UR - http://www.scopus.com/inward/record.url?scp=84975590030&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84975590030&partnerID=8YFLogxK

U2 - 10.1364/AO.34.006380

DO - 10.1364/AO.34.006380

M3 - Article

AN - SCOPUS:84975590030

SN - 1559-128X

VL - 34

SP - 6380

EP - 6388

JO - Applied optics

JF - Applied optics

IS - 28

ER -

Measurement of small rotation angles by using a parallel interference pattern

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this