Abstract
Conventional measurement methods for large flat mirrors are generally difficult and expensive. In most cases, comparison with a master or a reference flat similar in size is required. Using gravity, as in modern pendulum-type electronic levels, takes advantage of a free reference to precisely measure inclination or surface slopes. We describe using two electronic levels to measure flatness of large mirrors. We provide measurement results on a 1.6-m-diameter flat mirror to an accuracy of 50 nm rms of low-order Zernike aberrations.
Original language | English (US) |
---|---|
Article number | 023604 |
Journal | Optical Engineering |
Volume | 47 |
Issue number | 2 |
DOIs | |
State | Published - Feb 1 2008 |
Keywords
- Electronic levels
- Large flat mirrors
- Metrology
- Optical manufacturing
- Slope testing
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- General Engineering