TY - JOUR
T1 - Measurement of absolute displacement based on dual-path submicron-aperture fiber point-diffraction interferometer
AU - Wang, Zhichao
AU - Wang, Daodang
AU - Gong, Zhidong
AU - Xu, Ping
AU - Liang, Rongguang
AU - Zhao, Jufeng
AU - Li, Wei
N1 - Funding Information:
This material is based on work funded by National Natural Science Foundation of China (NSFC)(51375467,11404312,5147615451404223); Zhejiang Provincial Natural Science Foundation of China (LY17E050014, Q14E060016); Zhejiang Key Discipline of Instrument Science and Technology (JL150508, JL150502).
Publisher Copyright:
© 2017
PY - 2017/7/1
Y1 - 2017/7/1
N2 - The measurement of three-dimensional absolute displacement within large range can be achieved with submicron-aperture fiber point-diffraction interferometer (SFPDI), in which the numerical iterative algorithm for displacement reconstruction and point-diffraction wavefront determine the achievable measurement accuracy, reliability and efficiency of the system. To avoid the poor measurement accuracy in the lateral direction parallel to the fringe direction in the SFPDI with only one fiber pair, a dual-path SFPDI (DP-SFPDI) based on modified fast searching particle swarm optimization (PSO) algorithm is proposed to realize the rapid and accurate measurement of three-dimensional absolute displacement. Based on the DP-SFPDI with two submicron-aperture fiber pairs and modified PSO method, the measurement reliability, efficiency and accuracy in all the three dimensions of the system are significantly improved, making it more feasible for practical application. The effect of point-diffraction wavefront error on the measurement is analyzed. Both the numerical simulation and comparison experiments have been carried out to demonstrate the accuracy and feasibility of the proposed DP-SFPDI system, high measurement accuracy, convergence rate and efficiency have been realized with the proposed method.
AB - The measurement of three-dimensional absolute displacement within large range can be achieved with submicron-aperture fiber point-diffraction interferometer (SFPDI), in which the numerical iterative algorithm for displacement reconstruction and point-diffraction wavefront determine the achievable measurement accuracy, reliability and efficiency of the system. To avoid the poor measurement accuracy in the lateral direction parallel to the fringe direction in the SFPDI with only one fiber pair, a dual-path SFPDI (DP-SFPDI) based on modified fast searching particle swarm optimization (PSO) algorithm is proposed to realize the rapid and accurate measurement of three-dimensional absolute displacement. Based on the DP-SFPDI with two submicron-aperture fiber pairs and modified PSO method, the measurement reliability, efficiency and accuracy in all the three dimensions of the system are significantly improved, making it more feasible for practical application. The effect of point-diffraction wavefront error on the measurement is analyzed. Both the numerical simulation and comparison experiments have been carried out to demonstrate the accuracy and feasibility of the proposed DP-SFPDI system, high measurement accuracy, convergence rate and efficiency have been realized with the proposed method.
KW - Absolute displacement measurement
KW - Dual-path point-diffraction interferometer
KW - Particle swarm algorithm
KW - Wavefront error
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U2 - 10.1016/j.ijleo.2017.05.020
DO - 10.1016/j.ijleo.2017.05.020
M3 - Article
AN - SCOPUS:85019082634
SN - 0030-4026
VL - 140
SP - 802
EP - 811
JO - Optik
JF - Optik
ER -