@inproceedings{2255e7ac37ab4788aed85cbc1dbbaed5,
title = "Maximum likelihood estimation as a general method of combining sub-aperture data for interferometric testing",
abstract = "Interferometers accurately measure the difference between two wavefronts, one from a reference surface and the other from an unknown surface. If the reference surface is near-perfect or is accurately known from some other test, then the shape of the unknown surface can be determined. We investigate the case where neither the reference surface nor the surface under test is known. By making multiple modulated measurements where both surfaces are translated and rotated, we obtain sufficient information to reconstruct the figure of both surfaces. We have developed software that provides a maximum likelihood estimation of both surfaces, as well as an assessment of the quality of the reconstruction. This was demonstrated for the measurement of a large flat mirror, using a smaller reference mirror that has significant shape errors.",
keywords = "Absolute surface shape metrology, Interferometry, Maximum likelihood estimation, Modulated sub-aperture interferometric testing, Optical testing, Sub-aperture testing",
author = "Peng Su and Jim Burge and Sprowl, {Robert A.} and Jose Sasian",
year = "2006",
doi = "10.1117/12.692233",
language = "English (US)",
isbn = "0819464279",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "International Optical Design Conference 2006",
note = "International Optical Design Conference 2006 ; Conference date: 04-06-2006 Through 08-06-2006",
}