Materials Research Society Symposium Proceedings: Preface

Duane S. Boning, Johann W. Bartha, Ara Philipossian, Greg Shinn, Ingrid Vos

Research output: Contribution to journal › Conference article › peer-review

Original language	English (US)
Pages (from-to)	xi
Journal	Materials Research Society Symposium Proceedings
Volume	816
State	Published - 2004
Event	Advances in Chemical-Mechanical Polishing - San Francisco, CA, United States Duration: Apr 13 2004 → Apr 15 2004

ASJC Scopus subject areas

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title = "Materials Research Society Symposium Proceedings: Preface",

author = "Boning, \{Duane S.\} and Bartha, \{Johann W.\} and Ara Philipossian and Greg Shinn and Ingrid Vos",

year = "2004",

language = "English (US)",

volume = "816",

pages = "xi",

journal = "Materials Research Society Symposium Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Advances in Chemical-Mechanical Polishing ; Conference date: 13-04-2004 Through 15-04-2004",

}

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T1 - Materials Research Society Symposium Proceedings

T2 - Advances in Chemical-Mechanical Polishing

AU - Boning, Duane S.

AU - Bartha, Johann W.

AU - Philipossian, Ara

AU - Shinn, Greg

AU - Vos, Ingrid

PY - 2004

Y1 - 2004

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M3 - Conference article

AN - SCOPUS:12744269989

SN - 0272-9172

VL - 816

SP - xi

JO - Materials Research Society Symposium Proceedings

JF - Materials Research Society Symposium Proceedings

Y2 - 13 April 2004 through 15 April 2004

ER -