Mastering multi-depth bio-chip patterns with DVD LBRs

Ryuichi Katayama, Yuzuru Takashima, Doug Carson

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Bio chip and bio disc are rapidly growing technologies used in medical, health and other industries. While there are numerous unique designs and features, these products all rely on precise three-dimensional micro-fluidic channels or arrays to move, separate and combine samples under test. These bio chip and bio disc consumables are typically manufactured by molding these parts to a precise three-dimensional pattern on a negative metal stamper, or they can be made in smaller quantities using an appropriate curable resin and a negative mold/stamper. Stampers required for bio chips have been traditionally made using either micro machining or XY stepping lithography. Both of these technologies have their advantages as well as limitations when it comes to creating micro-fluidic patterns. Significant breakthroughs in continuous maskless lithography have enabled accurate and efficient manufacturing of micro-fluidic masters using LBRs (Laser Beam Recorders) and DRIE (Deep Reactive Ion Etching). The important advantages of LBR continuous lithography vs. XY stepping lithography and micro machining are speed and cost. LBR based continuous lithography is >100x faster than XY stepping lithography and more accurate than micro machining. Several innovations were required in order to create multi-depth patterns with sub micron accuracy. By combining proven industrial LBRs with DCA's G3-VIA pattern generator and DRIE, three-dimensional bio chip masters and stampers are being manufactured efficiently and accurately.

Original languageEnglish (US)
Title of host publicationOptical Data Storage 2017
Subtitle of host publicationFrom New Materials to New Systems
EditorsRyuichi Katayama, Yuzuru Takashima
ISBN (Electronic)9781510612259
StatePublished - 2017
EventOptical Data Storage 2017: From New Materials to New Systems, ODS 2017 - San Diego, United States
Duration: Aug 6 2017 → …

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


OtherOptical Data Storage 2017: From New Materials to New Systems, ODS 2017
Country/TerritoryUnited States
CitySan Diego
Period8/6/17 → …


  • Bio Chip
  • LBR
  • Lithography
  • Micro Fluidics

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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