Mass-producible microscopic computer-generated holograms: Microtags

M. R. Descour, W. C. Sweatt, A. K. Ray-Chaudhuri, K. D. Krenz, M. E. Warren, S. H. Kravitz, D. A. Tichenor, R. H. Stulen, T. L. Love

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

We have developed a method for encoding phase and amplitude in microscopic computer-generated holograms (microtags) for security applications. An 8 × 8 cell phase-only and an 8 × 8 cell phase-and-amplitude microtag design has been exposed in photoresist by the extreme-ultraviolet (13.4-nm) lithography tool developed at Sandia National Laboratories. Each microtag measures 80 μm × 160 μm and contains features that are 0.2 μm wide. Fraunhofer zone diffraction patterns can be obtained from fabricated microtags without any intervening optics and compare favorably with predicted diffraction patterns.

Original languageEnglish (US)
Pages (from-to)1951-1953
Number of pages3
JournalOptics letters
Volume21
Issue number23
DOIs
StatePublished - Dec 1 1996
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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