@inproceedings{0082fb3a08a14ecd816c5fe25a16bdd2,
title = "Maskless lithography tool for fabrication and inspection of diffractive optical elements and computer generated holograms",
abstract = "A high-speed maskless lithography tool is described for fabricating diffractive optical elements and computer generated holograms. The system has the capability to write gray-scale features is also used for inspection of the sample after fabrication.",
author = "M. Zaverton and J. Sierchio and Kim, \{Y. S.\} and D. Hansen and W. Bletcher and J. Tamkin and Milster, \{T. D.\}",
year = "2010",
doi = "10.1364/oft.2010.otuc5",
language = "English (US)",
isbn = "9781557528933",
series = "Optics InfoBase Conference Papers",
publisher = "Optical Society of America (OSA)",
booktitle = "Optical Fabrication and Testing, OFT 2010",
note = "Optical Fabrication and Testing, OFT 2010 ; Conference date: 13-06-2010 Through 17-06-2010",
}