Manufacturability and performance of microdisk resonators from the AIM Photonics foundry

Kerry R. Nierenberg; Shelbi L. Jenkins; Erfan M. Fard; Kyung Jo Kim; Sasaan A. Showghi; Robert A. Norwood

doi:10.1364/OPTCON.501841

Manufacturability and performance of microdisk resonators from the AIM Photonics foundry

Kerry R. Nierenberg, Shelbi L. Jenkins, Erfan M. Fard, Kyung Jo Kim, Sasaan A. Showghi, Robert A. Norwood

Optical Sciences

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

The field of integrated photonics relies heavily on foundries to produce not only novel technologies, but also reliable ones. Examining the output of complementary metal-oxide-semiconductor (CMOS) foundries such as that affiliated with the AIM Photonics partnership provides valuable insight into the manufacturability of integrated photonic telecommunications devices when produced in large numbers. We present an analysis of the passive performance of numerous silicon microdisk resonators. At ambient temperature, the resonators exhibit on average insertion loss of ∼6 dB, a free spectral range of ∼25 nm, and quality factors of Q > 8.3 × 10³. We also report a study of temperature dependence on the resonant wavelength of the devices. Our characterization of these resonators demonstrates reproducibility of qualities related to accuracy in fabrication, as well as in experimental measurement.

Original language	English (US)
Pages (from-to)	2209-2214
Number of pages	6
Journal	Optics Continuum
Volume	2
Issue number	10
DOIs	https://doi.org/10.1364/OPTCON.501841
State	Published - 2023

ASJC Scopus subject areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics

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10.1364/OPTCON.501841

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title = "Manufacturability and performance of microdisk resonators from the AIM Photonics foundry",

abstract = "The field of integrated photonics relies heavily on foundries to produce not only novel technologies, but also reliable ones. Examining the output of complementary metal-oxide-semiconductor (CMOS) foundries such as that affiliated with the AIM Photonics partnership provides valuable insight into the manufacturability of integrated photonic telecommunications devices when produced in large numbers. We present an analysis of the passive performance of numerous silicon microdisk resonators. At ambient temperature, the resonators exhibit on average insertion loss of ∼6 dB, a free spectral range of ∼25 nm, and quality factors of Q > 8.3 × 103. We also report a study of temperature dependence on the resonant wavelength of the devices. Our characterization of these resonators demonstrates reproducibility of qualities related to accuracy in fabrication, as well as in experimental measurement.",

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AU - Showghi, Sasaan A.

AU - Norwood, Robert A.

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Manufacturability and performance of microdisk resonators from the AIM Photonics foundry

Abstract

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