Abstract
Plasma experiments were used to show that macromolecule formation can occur homogeneously in a plasma, and is strongly related to the plasma operating parameters and the amount of hydrogen added to the reactor. A commercially available plasma chemistry model was used in conjunction with the experiments. A growth mechanism and simulated results suggested that macromolecules formed through CF3 propagation reactions with CwF2w+1 radicals produced by electron impact dissociation of fluoroalkane species.
Original language | English (US) |
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Pages (from-to) | 1389-1402 |
Number of pages | 14 |
Journal | Journal of Applied Physics |
Volume | 93 |
Issue number | 3 |
DOIs | |
State | Published - Feb 1 2003 |
ASJC Scopus subject areas
- General Physics and Astronomy