Low-loss thin SOI waveguides and high-Q ring resonators

M. A. Webster, R. M. Pafchek, G. Sukumaran, T. L. Koch

Research output: Chapter in Book/Report/Conference proceedingConference contribution


We report quasi-planar ridge waveguides with losses of < 0.7dB/cm in thin silicon-oninsulator material including waveguide-based ring resonators with quality factors of Q ~ 106.

Original languageEnglish (US)
Title of host publicationFrontiers in Optics, FiO 2005
PublisherOptical Society of America (OSA)
ISBN (Print)1557527970, 9781557527974
StatePublished - 2005
EventFrontiers in Optics, FiO 2005 - Tucson, AZ, United States
Duration: Oct 16 2005Oct 21 2005

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701


OtherFrontiers in Optics, FiO 2005
Country/TerritoryUnited States
CityTucson, AZ

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics


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