Low loss Si-SiO2-Si 8nm slot waveguides

R. M. Pafchek; J. Li; R. S. Tummidi; T. L. Koch

doi:10.1109/CLEO.2008.4551525

Low loss Si-SiO₂-Si 8nm slot waveguides

R. M. Pafchek
, J. Li
, R. S. Tummidi
, T. L. Koch

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Scopus citations

Abstract

Quasi-TM-mode propagation loss of 1.83dB/cm at λ = 1.565 μm is achieved in horizontal Si(amorphous)-SiO2-Si(crystalline) slot waveguides with 8.3nm slots fabricated on silicon-on-insulator. Waveguide loss is measured using a ring resonator with Q ∼ 3×10⁵.

Original language	English (US)
Title of host publication	2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS
DOIs	https://doi.org/10.1109/CLEO.2008.4551525
State	Published - 2008
Externally published	Yes
Event	Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS 2008 - San Jose, CA, United States Duration: May 4 2008 → May 9 2008

Publication series

Name	2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS

Other

Other	Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS 2008
Country/Territory	United States
City	San Jose, CA
Period	5/4/08 → 5/9/08

ASJC Scopus subject areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/CLEO.2008.4551525

Cite this

Pafchek, R. M., Li, J., Tummidi, R. S., & Koch, T. L. (2008). Low loss Si-SiO₂-Si 8nm slot waveguides. In 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS Article 4551525 (2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS). https://doi.org/10.1109/CLEO.2008.4551525

Low loss Si-SiO₂-Si 8nm slot waveguides. / Pafchek, R. M.; Li, J.; Tummidi, R. S. et al.
2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS. 2008. 4551525 (2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Pafchek, RM, Li, J, Tummidi, RS & Koch, TL 2008, Low loss Si-SiO₂-Si 8nm slot waveguides. in 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS., 4551525, 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS, Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS 2008, San Jose, CA, United States, 5/4/08. https://doi.org/10.1109/CLEO.2008.4551525

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title = "Low loss Si-SiO2-Si 8nm slot waveguides",

abstract = "Quasi-TM-mode propagation loss of 1.83dB/cm at λ = 1.565 μm is achieved in horizontal Si(amorphous)-SiO2-Si(crystalline) slot waveguides with 8.3nm slots fabricated on silicon-on-insulator. Waveguide loss is measured using a ring resonator with Q ∼ 3×105.",

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AB - Quasi-TM-mode propagation loss of 1.83dB/cm at λ = 1.565 μm is achieved in horizontal Si(amorphous)-SiO2-Si(crystalline) slot waveguides with 8.3nm slots fabricated on silicon-on-insulator. Waveguide loss is measured using a ring resonator with Q ∼ 3×105.

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