Low loss Si-SiO2-Si 8nm slot waveguides

R. M. Pafchek, J. Li, R. S. Tummidi, T. L. Koch

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Quasi-TM-mode propagation loss of 1.83dB/cm at l = 1.565 μm is achieved in horizontal Si(amorphous)-SiO2-Si(crystalline) slot waveguides with 8.3nm slots fabricated on silicon-oninsulator. Waveguide loss is measured using a ring resonator with Q ~ 3x105.

Original languageEnglish (US)
Title of host publicationConference on Lasers and Electro-Optics, CLEO 2008
PublisherOptical Society of America
ISBN (Print)9781557528599
StatePublished - 2008
EventConference on Lasers and Electro-Optics, CLEO 2008 - San Jose, CA, United States
Duration: May 4 2008May 9 2008

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701


OtherConference on Lasers and Electro-Optics, CLEO 2008
Country/TerritoryUnited States
CitySan Jose, CA

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics


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