Low loss Si-SiO2-Si 8-nm slot waveguides

R. M. Pafchek, J. Li, R. S. Tummidi, T. L. Koch

Research output: Contribution to journalArticlepeer-review

15 Scopus citations


Quasi-transverse-magnetic-mode propagation loss of 1.83 dB/cm at λ = 1.565 μm is achieved in horizontal Si(amorphous)-SiO2-Si(crystalline) slot waveguides with 8.3-nm slots fabricated on silicon-on-insulator. Waveguide loss is measured using a ring resonator with Q ∼ 3 × 105.

Original languageEnglish (US)
Pages (from-to)353-355
Number of pages3
JournalIEEE Photonics Technology Letters
Issue number6
StatePublished - Mar 15 2009


  • Dielectric waveguides
  • Silicon-on-insulator technology

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering


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