Low loss Si-SiO2-Si 8-nm slot waveguides

R. M. Pafchek; J. Li; R. S. Tummidi; T. L. Koch

doi:10.1109/LPT.2008.2011651

Low loss Si-SiO₂-Si 8-nm slot waveguides

R. M. Pafchek, J. Li, R. S. Tummidi, T. L. Koch

Research output: Contribution to journal › Article › peer-review

17 Scopus citations

Abstract

Quasi-transverse-magnetic-mode propagation loss of 1.83 dB/cm at λ = 1.565 μm is achieved in horizontal Si(amorphous)-SiO₂-Si(crystalline) slot waveguides with 8.3-nm slots fabricated on silicon-on-insulator. Waveguide loss is measured using a ring resonator with Q ∼ 3 × 10⁵.

Original language	English (US)
Pages (from-to)	353-355
Number of pages	3
Journal	IEEE Photonics Technology Letters
Volume	21
Issue number	6
DOIs	https://doi.org/10.1109/LPT.2008.2011651
State	Published - Mar 15 2009
Externally published	Yes

Keywords

Dielectric waveguides
Silicon-on-insulator technology

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

Access to Document

10.1109/LPT.2008.2011651

Cite this

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title = "Low loss Si-SiO2-Si 8-nm slot waveguides",

abstract = "Quasi-transverse-magnetic-mode propagation loss of 1.83 dB/cm at λ = 1.565 μm is achieved in horizontal Si(amorphous)-SiO2-Si(crystalline) slot waveguides with 8.3-nm slots fabricated on silicon-on-insulator. Waveguide loss is measured using a ring resonator with Q ∼ 3 × 105.",

keywords = "Dielectric waveguides, Silicon-on-insulator technology",

author = "Pafchek, {R. M.} and J. Li and Tummidi, {R. S.} and Koch, {T. L.}",

note = "Funding Information: Manuscript received July 30, 2008; revised October 31, 2008. First published January 09, 2009; current version published February 27, 2009. This work was supported by the AFOSR MURI on Electrically-Pumped Silicon-Based Lasers for Chip-Scale Interconnects under Dr. Gernot Pomrenke, Pennsylvania BFTDA Grant ME#21-116-0014, and by the Army Research Laboratory Cooperative Agreement W911NF-04-2-0015.",

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doi = "10.1109/LPT.2008.2011651",

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T1 - Low loss Si-SiO2-Si 8-nm slot waveguides

AU - Pafchek, R. M.

AU - Li, J.

AU - Tummidi, R. S.

AU - Koch, T. L.

N1 - Funding Information: Manuscript received July 30, 2008; revised October 31, 2008. First published January 09, 2009; current version published February 27, 2009. This work was supported by the AFOSR MURI on Electrically-Pumped Silicon-Based Lasers for Chip-Scale Interconnects under Dr. Gernot Pomrenke, Pennsylvania BFTDA Grant ME#21-116-0014, and by the Army Research Laboratory Cooperative Agreement W911NF-04-2-0015.

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N2 - Quasi-transverse-magnetic-mode propagation loss of 1.83 dB/cm at λ = 1.565 μm is achieved in horizontal Si(amorphous)-SiO2-Si(crystalline) slot waveguides with 8.3-nm slots fabricated on silicon-on-insulator. Waveguide loss is measured using a ring resonator with Q ∼ 3 × 105.

AB - Quasi-transverse-magnetic-mode propagation loss of 1.83 dB/cm at λ = 1.565 μm is achieved in horizontal Si(amorphous)-SiO2-Si(crystalline) slot waveguides with 8.3-nm slots fabricated on silicon-on-insulator. Waveguide loss is measured using a ring resonator with Q ∼ 3 × 105.

KW - Dielectric waveguides

KW - Silicon-on-insulator technology

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