Low-loss quasi-planar ridge waveguides formed on thin silicon-on-insulator

M. A. Webster; R. M. Pafchek; G. Sukumaran; T. L. Koch

doi:10.1063/1.2139836

Low-loss quasi-planar ridge waveguides formed on thin silicon-on-insulator

M. A. Webster, R. M. Pafchek, G. Sukumaran, T. L. Koch

Research output: Contribution to journal › Article › peer-review

55 Scopus citations

Abstract

Low-loss, quasi-planar ridge waveguide structures have been designed and fabricated in silicon-on-insulator material with waveguide propagation losses of <0.7 dBcm at 1550 nm, and a Q∼ 106 measured in a ring resonator configuration. These structures offer tight vertical field confinement with scalable bending losses, and should be of interest for integration with both active and passive components. Waveguides were fabricated using optical lithography and processing compatible with silicon electronics.

Original language	English (US)
Article number	231108
Pages (from-to)	1-3
Number of pages	3
Journal	Applied Physics Letters
Volume	87
Issue number	23
DOIs	https://doi.org/10.1063/1.2139836
State	Published - 2005
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Low-loss quasi-planar ridge waveguides formed on thin silicon-on-insulator",

abstract = "Low-loss, quasi-planar ridge waveguide structures have been designed and fabricated in silicon-on-insulator material with waveguide propagation losses of <0.7 dBcm at 1550 nm, and a Q∼ 106 measured in a ring resonator configuration. These structures offer tight vertical field confinement with scalable bending losses, and should be of interest for integration with both active and passive components. Waveguides were fabricated using optical lithography and processing compatible with silicon electronics.",

author = "Webster, {M. A.} and Pafchek, {R. M.} and G. Sukumaran and Koch, {T. L.}",

note = "Funding Information: The authors acknowledge the technical assistance of Grant Reed and support by the National Science Foundation under Grant No. ECS-0335067 and by the state of Pennsylvania under BFTDA Grant No. 21-116-0014. ",

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AU - Webster, M. A.

AU - Pafchek, R. M.

AU - Sukumaran, G.

AU - Koch, T. L.

N1 - Funding Information: The authors acknowledge the technical assistance of Grant Reed and support by the National Science Foundation under Grant No. ECS-0335067 and by the state of Pennsylvania under BFTDA Grant No. 21-116-0014.

PY - 2005

Y1 - 2005

N2 - Low-loss, quasi-planar ridge waveguide structures have been designed and fabricated in silicon-on-insulator material with waveguide propagation losses of <0.7 dBcm at 1550 nm, and a Q∼ 106 measured in a ring resonator configuration. These structures offer tight vertical field confinement with scalable bending losses, and should be of interest for integration with both active and passive components. Waveguides were fabricated using optical lithography and processing compatible with silicon electronics.

AB - Low-loss, quasi-planar ridge waveguide structures have been designed and fabricated in silicon-on-insulator material with waveguide propagation losses of <0.7 dBcm at 1550 nm, and a Q∼ 106 measured in a ring resonator configuration. These structures offer tight vertical field confinement with scalable bending losses, and should be of interest for integration with both active and passive components. Waveguides were fabricated using optical lithography and processing compatible with silicon electronics.

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Low-loss quasi-planar ridge waveguides formed on thin silicon-on-insulator

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