Abstract
We proposed a Wollaston-prism-based snapshot phase-shifting diffraction phase microscope (WP-SPDPM) for low-coherence snapshot quantitative phase imaging and videography. Wollaston prism separates two orthogonally linearly polarized beams with high degrees of polarization at a sufficiently small separation angle; one of the beams passing through a pinhole serves as the reference beam. Four phase-shifted interferograms are simultaneously acquired with a polarization camera to accurately retrieve a high spatial resolution phase map. The system is nearly common-path in configuration and can achieve a large slope range and high accuracy. In addition to the ability to resist environmental noise, the WP-SPDPM is suitable for phase measurement using low-coherence light. The accuracy and large measurable slope range of the proposed system is validated and compared experimentally with a commercial profilometer. We believe WP-SPDPM is a powerful tool for the accurate and robust quantitative phase measurement and has a significant potential of the real-time phase imaging.
Original language | English (US) |
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Article number | 107618 |
Journal | Optics and Lasers in Engineering |
Volume | 167 |
DOIs | |
State | Published - Aug 2023 |
Keywords
- Optical metrology
- Optical testing
- Quantitative phase imaging
- Surface measurement
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Mechanical Engineering
- Electrical and Electronic Engineering